TiCl4 Barrier Process Engineering in Semiconductor Manufacturing
نویسندگان
چکیده
منابع مشابه
TiCl4 Barrier Process Engineering in Semiconductor Manufacturing
Titanium nitride (TiN) not only was utilized in the wear-resistant coatings industry but it was also adopted in barrier processes for semiconductor manufacturing. Barrier processes include the titanium (Ti) and TiN processes, which are commonly used as diffusion barriers in via/contact applications. However, engineers frequently struggle at the via/contact module in the beginning of every techn...
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ژورنال
عنوان ژورنال: Coatings
سال: 2016
ISSN: 2079-6412
DOI: 10.3390/coatings6010002